Manuals

Welcome to the Tecport Manual Directory

10

Pressure Measurement

Gauges

• Granville-Phillips Series 358 Micro-Ion – 358013-B
• InstruTech The Worker Bee Convection Gauge – CVG101

Leak Detectors

• Leybold Leak Detector Operating Manual – Pheonix L300

11

Thickness Measurement

Crystal Thickness Controllers

• Inficon IC/6 Thin Film Deposition Controller

Optical Monitoring System

Intellemetrics Systems

• Dual Beam Integrated Optical Monitor System – IL55x Series
• Multi-Way Quartz Crystal Head and Test Glass Changer – IL540.10×6
• White Light Optical Monitor User Manual – IL553 
• Automated Carousel Test Glass Changer User Manual
• Broadband Optical Monitor Training Manual
• Optical Alignment Tutorial – Intellemetrics Free Space Optical Monitors
• FilmDirector2 User Manual
• FilmMaker2 User Manual

Crystal Rotary Sensor Head

• Inficon Operation and Service – RSH-600 / RHS-601
• Jeol 6Xtal Rotary Sensor SSR Series
• Jeol 6Xtal Rotary Sensor Head Position Adjustment
• Jeol 6Xtal Rotary Sensor Maintenance
• Jeol 6Xtal Rotary Sensor Part Diagram
• Jeol 12Xtal Rotary Sensor TRS Series

12

Surface Treatment Sources

Ion Sources

Kaufman & Robinson, Inc

• EH 2000 Ion Source Manual
• EH 3000 Ion Source Manual – Hollow Cathode Version
• Automated Controller Manual – End Hall Ion Source with Hollow Cathode (eHC 3005A/30010A/15015A)
• Automated Controller Manual – End Hall Ion Source with Hollow Cathode eHC (25020A)
• Discharge Controller Manual – DC 3005/30010/15012
• Discharge Controller Manual – DC 25020
• Emission Controller Manual – EC 12015
• Keeper Controller Manual – KC 8002

Plasma Sources

• Jeol Built In Plasma Source Instructions – BS-80011BPG
• Jeol Maintenance Manual – BS80011BPG
• Jeol Plasma Source Drawing – BS80011BPG
• Jeol Performance Chart of the Plasma Source at Semi-auto Control

Electron Sources

• KRI Electron Source Manual – LHC 1000

13

Deposition Sources

Electron Beam Sources

EB Sources

• Instruction Manual – EB2

Ferro Tec EV M 6/8/10 Series

• Instruction Handbook
• Mounting Instructions – Evaporation Controller Type Genius
• Operation Manual – High-Voltage Power Supply Unit
• Operation Manual – Filament Power Supply
• Mounting Instructions – Electron  Beam Evaporator

Jeol JEBG Series

• Electron Beam Source Instruction Handbook – BS-60050
• Daily Maintenance for BS-60050
• Scan Controller Instruction Handbook – BS-64010
• EB Source Power Supplies – JST-F Series

14

Flow Measurement

Mass Flow Controller

• Apex Mass Flow Controller – 16 Series
• Apex Digital Pressure and Vacuum Gauges and Controllers

Water Flow

• Kobold KAL-D Series Thermal Flow Switch
• Bürkert Flow Rate Controller – MA8032
• Bürkert Process Value & External Setpoint – MA8400
• Bürkert Inline Fittings – MAS030
• Matsui Mold Temperature Controller – GMC (L,H,A)-U

17

Substrate Rotation

Mitsubishi Speed Controller – FR-D700

• Inverter Instruction Manual
• Inverter Installation Guide
• Frequency Inverter Instruction Manual
• Safety Stop Function Instruction Manual

18

Pumps

Cryo Pumps

• Cryo-Torr 20HP Cryopump – 8004219
• Cryo-Torr 20HP Cryopump – 8004219 (Annotated)
•  

Ebara Dry Pump

• EV-S Instruction Manual, 200-200V – 0261-A13141
• EV-S Instruction Manual, 380-440V – 7331-A95272
• EV-S Pump Specification, 380-440V – 7311-Y94219

Edwards Pump

• Mechanical Boost – A301-51-880
• Rotary Vacuum – A344-02-880 (E1M40/80, E2M40/80, E2M40s/80s)
• Rotary Vacuum – A346-01-880 (E1M175/275, E2M175/275)