- Flexible evaporation techniques
- Integration of the most sophisticated and time-tested instruments by industrial leaders
- Advanced multilevel software structure to satisfy the most demanding engineer, and yet still provide a very user-friendly interface for the beginning technician.
- Complete process automation, remote control, trending, data analysis and recovery
Service and Support
Our motto “We serve to serve again” expresses our relentless drive for customer service – providing preventive maintenance and repair, training and technology support, process development, and continuously building a world wide service network of qualified technicians and engineers.
Shipping time is 12 weeks ARO, unrivaled by other manufacturers in the industry.
Trouble Free Commissioning
During commissioning, Tecport will not only satisfy the equipment specifications and integrity, but also will assist our customers in process development and fine tuning system parameters. By the end of commissioning, our customers are equipped with the training and process setup to start production immediately.
|Chamber||304L Stainless Steel Construction|
|Ultimate Pressure||10-7 Torr Range|
|Substiture Fixture||Dome, Flat Planetary|
|Evaporation Monitoring||Crystal Monitor, Optical Monitor|
|Process Control||Symphony provides user friendly operating software, named OPUS, with data logging, recipe builder, report generation, and remote access capabilities.|
|Evaporation Techniques||Thermal Resistance Evaporation, Electron Beam Evaporation, Ion Assisted Deposition (IAD), Ion Beam Sputtering (IBS), High Density Plasma Assisted Deposition (PAD)|
|Pumping System||Diffusion Pump, Cryogenic Pump, Turbo Pump Rotary Pump / Booster Pump Pumping time < 15 min to 3 x 10-5 Torr|
|Substrate heat||Quartz Halogen Heater with PID Temperature Control System|
|Cryogenic regenerator||Meissner Trap, Coil, 10HP compressor, T < -130 C, pumping speed up to 200,000 l/sec|
|Pressure gauge control||High Pressure: Penning Gauge, Ion GaugeLow Pressure: Pirani Gauge, Convectron Gauge|
|Utility||Electrical: 208/240/50Hz/60Hz/ 50kW 3-phaseWater: 30 GPM, Delta 40 PSI @ 21°CAir: Compressed air @ 85-125 PSI|
|Symphony 7||Symphony 9||Symphony 10||Symphony 12||Symphony 15|
|750mm diameter||900mm diameter||1050mm diameter||1200mm diameter||1500mm diameter|