IC/6 Sensor Measurement Module

The new IC/6 and XTC/3 thin film deposition controller from Inficon maximize process capability and flexibility for evaporation and other physical vapor deposition (PVD) processes. Enhanced software and logic I/O features provide improved process control integration. The IC6 uses ModeLock frequency measurement system to provide a stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 A/s every 1/10 second, allowing the user to make excellence repeatable.