Flexlab – Magnetron Sputtering

Exclusive Partnership with Solayer

Flexlab Delivers Flexibility from Research and Development to Production.

Description

Tecport relentlessly strives to develop innovative ideas to improve their product and competitiveness through continuous research and development of new processes, new chemicals, and new instruments.

Flexlab offers the customer the most versatile sputtering system in the market by virtue of its configurable system design. Its flexible design allows the customer to configure the system to perform upstream or downstream, single and multiple layers, and co-deposition.

Flexlab Advantage

Flexible Deposition Methods

Equipped with RF and DC Sputter Source to provide the capability of depositing metallic, inorganic and dielectric organic material.

Sputtering Modes

A combination of four 3” sputter sources, or three 4” sputter sources allows multilayer and co-deposition capability with upstream or downstream sputtering methods

System Configuration

Automatic load-lock system with compact design and optimization of sputter sources and shutter configuration minimizes cross contamination. Standard on Flexlab Systems.

Specification

Main Chamber304L Stainless Steel Construction, 500 diameter x 460 H (mm), 6” View Port with Shutter
Lead Lock Chamber250W x 250D x 60H (mm), 5” View Port, Ball Bush Slide Unit with Bellow Seal
Ultimate Pressure10-7 Torr Range
Substrate Fixture6″ Planetary
Substrate Rotation10 – 60 RPM Magnetic Ferro Seal
Substrate Heat6” SiC with Max Temperature 650° C
Substrate BiosRF or DC
Process ControlFlexlab provides user friendly operating software with data logging, recipe builder, report generation, and remote access capabilities. 15” Touch Screen, PC Based
Power Supply600W RF Power Supply, 2kW DC Power Supply
Sputter GunFour 3-inch or Three 4-inch Sputter Guns with Shutters
Pumping SystemTurbo Pump – 800 l/s, Rotary Pump Main – 970 l/min,
Rotary Pump Load Lock – 300 l/min
Gas Delivery SystemMFC – Argon, Oxygen, Nitrogen, Touch Screen MFC Readout
Pressure Gauge ControlGP 307
High Pressure: Penning Gauge, Ion Gauge
Low Pressure: Pirani Gauge, Convectron Gauge
UtilityElectrical: 208/240/50Hz/60Hz/ 50kW 3-phase
Water: 30 GPM, Delta 40 PSI @ 21°C
Air: Compressed air @ 85-125 PSI
Dimensions1600W x 1500D x 2200H (mm)